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convection enhanced Pirani and vacuum switch)
Not tested
high-performance ThermoFlex Recirculating Chillers are reliable
Microprocessor controller allows for complete automatic processing
Used CEE Apogee 200 Benchtop Spin Coater convection enhanced Pirani and vacuumCEE Apogee 200 Benchtop Spin Coater Tabletop photoresist spin coater for use with wafers up to 200mm. Eliminate process variability from your critical experiments with the Cee Apogee Spin Coater. This compact system delivers track quality performance with its durable, chemically compatible design and fully programmable, user friendly operation. Full color touchscreen graphical user interface (GUI). Supports unlimited user defined program steps for
